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We summarized The existing progress standing of the significant-power DUV laser both equally in the wavelength of FHG of your 1-μm laser and at 193 nm. The the latest advancement of the strong-state/fiber laser, plus the nonlinear optical crystals, prompts not simply the typical ability but will also the beam top quality (coherence) of the DUV lasers to an unprecedented degree.

By way of example, The existing concave OC could get replaced by a aircraft mirror which could mitigate the ability density within the surface of M1 and the diamond. What's more, applying substantial injury threshold coatings for M1 and diamond would also improve the output electrical power with none damages. Then, the NIR laser on the 2nd Stokes wavelength can be large more than enough, along with its superior beam high quality, to crank out the ultimate DUV laser at 193 nm having a substantial normal energy.

On the other hand, the beam excellent of the larger electrical power DUV laser would develop into worse as a result of additional serious thermal and nonlinear results. For this reason, the frequency conversion procedures must be carefully created to mitigate the aforementioned outcomes. Consequently, a large-electrical power DUV laser with the FHG of one μm with a fantastic beam quality might be obtained and will be advantageous for acquiring the shorter wavelength DUV lasers for instance 193 nm by SFG.

Each the 1040 nm and 1078 nm laser originate from just one dual-wavelength Yb-doped fiber laser. Every laser is amplified by levels of fiber amplifier and Yb-doped elements amplifier, respectively.

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While in the scientific and industrial programs, the beam top quality in the DUV laser is likewise a significant parameter. Specially, the beam top quality of the DUV laser drastically impacts the laser machining final results. The beam quality in the DUV laser is decided by that of the basic laser plus the crystal to the frequency conversion. Lately, a higher-energy DUV laser (>10 W) at 258 nm was documented which has a beam quality of M2 < 1.five, which was generated by FHG of the Yb:YAG laser at 1030 nm utilizing the CLBO crystal [thirteen]. This laser would bring on an even better laser machining result in comparison to the past DUV lasers with bigger M2.

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In more info addition, combining the stable-point out laser with other nonlinear system such as stimulated Raman scattering, NIR lasers can be reached at new wavelengths with superior energy and large beam excellent, which was analyzed via the evidence-of-basic principle experiment. This Raman laser plan delivers a completely new path to the significant-ability DUV laser, Primarily within the wavelength of 193 nm.

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The conversion performance from elementary NIR to DUV is from five% to 36% based on the reported ends in Table 1. Growing the conversion effectiveness will lessen the burden on the look and setup of the basic laser amplifier as well as the electric electric power consumption. A superb beam high-quality of the fundamental laser will even lead to your increasing from the conversion effectiveness and also the suitable electric power depth of your NIR and environmentally friendly laser in the SHG and FHG process, respectively. The best conversion efficiencies from NIR to inexperienced and inexperienced to DUV laser by utilization of CLBO crystal are 70% and close to fifty%, respectively [twelve], which corresponds on the conversion efficiency of 35% from fundamental to DUV.

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